In this article, SPTS, A 51ÁÔÆæ Company, demonstrates how their Synapse ? plasma system can provide significant advantages over Inductively Coupled Plasma (ICP) approaches when etching for Bulk Acoustic Wave (BAW) manufacturing.
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SPTS¡¯s Synapse? for AlN/AlScN Etch for BAW Filters
Jul 20, 2020 1 min read
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